Meaning

1 senses
  1. (uncountable)The organofluorine compound C₄F₈, related to cyclobutane by replacement of all C–H bonds with C–F bonds, and used as a deposition gas and etchant in semiconductor manufacture.

Origin

From octa- + fluoro- + cyclobutane.

From octa- + fluoro- + cyclobutane.

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Synonyms

1 synonyms

See also

neighbours in the dictionary
octafluorocyclobutane — meaning, examples, forms, synonyms | Krumeto